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1

Three-Dimensional Spherical Shell Resonator Gyroscope Fabricated Using Wafer-Scale Glassblowing

Zotov, Sergei A., Trusov, Alexander A., Shkel, Andrei M.

Journal:

Journal of Microelectromechanical Systems

Year:

2012

Language:

english

File:

PDF, 517 KB

english, 2012

2

Compensation of drifts in high-Q MEMS gyroscopes using temperature self-sensing

Prikhodko, Igor P., Trusov, Alexander A., Shkel, Andrei M.

Journal:

Sensors and Actuators A: Physical

Year:

2013

Language:

english

File:

PDF, 1.97 MB

english, 2013

3

Microscale Glass-Blown Three-Dimensional Spherical Shell Resonators

Prikhodko, Igor P., Zotov, Sergei A., Trusov, Alexander A., Shkel, Andrei M.

Journal:

Journal of Microelectromechanical Systems

Year:

2011

Language:

english

File:

PDF, 2.10 MB

english, 2011

4

[IEEE 2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Naples, FL, USA (2019.4.1-2019.4.5)] 2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Design Space Exploration of Hemi-Toroidal Fused Quartz Shell Resonators

Asadian, Mohammad H., Wang, Yusheng, Noor, Radwan M., Shkel, Andrei M.

Year:

2019

File:

PDF, 835 KB

2019

5

Rubidium vapor cell with integrated Bragg reflectors for compact atomic MEMS

Maximillian A. Perez, Uyen Nguyen, Svenja Knappe, Elizabeth A. Donley, John Kitching, Andrei M. Shkel

Journal:

Sensors and Actuators A: Physical

Year:

2009

Language:

english

File:

PDF, 1.82 MB

english, 2009

6

Foucault pendulum on a chip: Rate integrating silicon MEMS gyroscope

Igor P. Prikhodko, Sergei A. Zotov, Alexander A. Trusov, Andrei M. Shkel

Journal:

Sensors and Actuators A: Physical

Year:

2012

Language:

english

File:

PDF, 2.00 MB

english, 2012

7

Environmentally Robust MEMS Vibratory Gyroscopes for Automotive Applications

Acar, Cenk, Schofield, Adam R., Trusov, Alexander A., Costlow, Lynn E., Shkel, Andrei M.

Journal:

IEEE Sensors Journal

Year:

2009

Language:

english

File:

PDF, 3.32 MB

english, 2009

8

Classification of the Dubins set

Andrei M. Shkel, Vladimir Lumelsky

Journal:

Robotics and Autonomous Systems

Year:

2001

Language:

english

File:

PDF, 468 KB

english, 2001

9

Achieving Sub-Hz Frequency Symmetry in Micro-Glassblown Wineglass Resonators

Senkal, Doruk, Ahamed, Mohammed J., Trusov, Alexander A., Shkel, Andrei M.

Journal:

Journal of Microelectromechanical Systems

Year:

2014

Language:

english

File:

PDF, 4.68 MB

english, 2014

10

[IEEE 2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Naples, FL, USA (2019.4.1-2019.4.5)] 2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Characterization of Scale Factor Nonlinearities in Coriolis Vibratory Gyroscopes

Vatanparvar, Daryosh, Asadian, Mohammad H., Askari, Sina, Shkel, Andrei M.

Year:

2019

Language:

english

File:

PDF, 2.20 MB

english, 2019

11

Compensation of Frequency Split by Directional Lapping in Fused Quartz Micro Wineglass Resonators

Wang, Yusheng, Asadian, Mohammad H, Shkel, Andrei M

Journal:

Journal of Micromechanics and Microengineering

Year:

2018

Language:

english

File:

PDF, 16.52 MB

english, 2018

12

Performance characterization of a new temperature-robust gain-bandwidth improved MEMS gyroscope operated in air

Alexander A. Trusov, Adam R. Schofield, Andrei M. Shkel

Journal:

Sensors and Actuators A: Physical

Year:

2009

Language:

english

File:

PDF, 2.03 MB

english, 2009

13

Effects of Operational Frequency Scaling in Multi-Degree of Freedom MEMS Gyroscopes

Schofield, Adam R., Trusov, Alexander A., Shkel, Andrei M.

Journal:

IEEE Sensors Journal

Year:

2008

Language:

english

File:

PDF, 1.32 MB

english, 2008

14

What is MEMS Gyrocompassing? Comparative Analysis of Maytagging and Carouseling

Prikhodko, Igor P., Zotov, Sergei A., Trusov, Alexander A., Shkel, Andrei M.

Journal:

Journal of Microelectromechanical Systems

Year:

2013

Language:

english

File:

PDF, 2.66 MB

english, 2013

15

Micromachined gyroscope concept allowing interchangeable operation in both robust and precision modes

Adam R. Schofield, Alexander A. Trusov, Andrei M. Shkel

Journal:

Sensors and Actuators A: Physical

Year:

2011

Language:

english

File:

PDF, 694 KB

english, 2011

16

Glass-blown spherical microcells for chip-scale atomic devices

E. Jesper Eklund, Andrei M. Shkel, Svenja Knappe, Elizabeth Donley, John Kitching

Journal:

Sensors and Actuators A: Physical

Year:

2008

Language:

english

File:

PDF, 677 KB

english, 2008

17

Micromachined rate gyroscope architecture with ultra-high quality factor and improved mode ordering

Alexander A. Trusov, Adam R. Schofield, Andrei M. Shkel

Journal:

Sensors and Actuators A: Physical

Year:

2011

Language:

english

File:

PDF, 2.26 MB

english, 2011

18

Glass Blowing on a Wafer Level

Eklund, E. Jesper, Shkel, Andrei M.

Journal:

Journal of Microelectromechanical Systems

Year:

2007

Language:

english

File:

PDF, 1.28 MB

english, 2007

19

Demonstration of 1 Million $Q$ -Factor on Microglassblown Wineglass Resonators With Out-of-Plane Electrostatic Transduction

Senkal, Doruk, Ahamed, Mohammed J., Ardakani, Mohammad H. Asadian, Askari, Sina, Shkel, Andrei M.

Journal:

Journal of Microelectromechanical Systems

Year:

2015

Language:

english

File:

PDF, 4.96 MB

english, 2015

20

[IEEE 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Kauai, HI, USA (2017.3.27-2017.3.30)] 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Frequency split reduction by directional lapping of fused quartz micro wineglass resonators

Wang, Yusheng, Asadian, Mohammad H., Shkel, Andrei M.

Year:

2017

Language:

english

File:

PDF, 872 KB

english, 2017

21

[IEEE 2007 IEEE Sensors - Atlanta, GA, USA (2007.10.28-2007.10.31)] 2007 IEEE Sensors - Multi-Degree of Freedom Tuning Fork Gyroscope Demonstrating Shock Rejection

Schofield, Adam R., Trusov, Alexander A., Shkel, Andrei M.

Year:

2007

Language:

english

File:

PDF, 530 KB

english, 2007

22

A Novel Capacitive Detection Scheme With Inherent Self-Calibration

Trusov, Alexander A., Shkel, Andrei M.

Journal:

Journal of Microelectromechanical Systems

Year:

2007

Language:

english

File:

PDF, 813 KB

english, 2007

23

[IEEE 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Kauai, HI, USA (2017.3.27-2017.3.30)] 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Controlled capacitive gaps for electrostatic actuation and tuning of 3D fused quartz micro wineglass resonator gyroscope

Asadian, Mohammad H., Yusheng Wang,, Askari, Sina, Shkel, Andrei

Year:

2017

Language:

english

File:

PDF, 1.59 MB

english, 2017

24

Double-Sided Process for MEMS SOI Sensors With Deep Vertical Thru-Wafer Interconnects

Efimovskaya, Alexandra, Lin, Yu-Wei, Shkel, Andrei M.

Journal:

Journal of Microelectromechanical Systems

Year:

2018

Language:

english

File:

PDF, 5.06 MB

english, 2018

25

[IEEE 2018 40th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC) - Honolulu, HI (2018.7.18-2018.7.21)] 2018 40th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC) - Closed Loop Microfabricated Facial Reanimation Device Coupling EMG-Driven Facial Nerve Stimulation with a Chronically Implanted Multichannel Cuff Electrode

Askari, Sina, Presacco, Alessandro, Sahyouni, Ronald, Djalilian, Hamid, Shkel, Andrei, Lin, Harrison

Year:

2018

Language:

english

File:

PDF, 2.60 MB

english, 2018

26

Quality Factor Maximization Through Dynamic Balancing of Tuning Fork Resonator

Zotov, Sergei A., Simon, Brenton R., Prikhodko, Igor P., Trusov, Alexander A., Shkel, Andrei M.

Journal:

IEEE Sensors Journal

Year:

2014

Language:

english

File:

PDF, 4.50 MB

english, 2014

27

WholeâAngle MEMS Gyroscopes (Challenges and Opportunities) || Front Matter

Senkal, Doruk, Shkel, Andrei M.

Year:

2020

File:

PDF, 231 KB

2020

28

Single-mask fabrication of high-G piezoresistive accelerometers with extended temperature range

Eklund, E Jesper, Shkel, Andrei M

Journal:

Journal of Micromechanics and Microengineering

Year:

2007

Language:

english

File:

PDF, 424 KB

english, 2007

29

[IEEE 2020 IEEE/ION Position, Location and Navigation Symposium (PLANS) - Portland, OR, USA (2020.4.20-2020.4.23)] 2020 IEEE/ION Position, Location and Navigation Symposium (PLANS) - A Closed-Form Analytical Estimation of Vertical Displacement Error in Pedestrian Navigation

Jao, Chi-Shih, Wang, Yusheng, Askari, Sina, Shkel, Andrei M.

Year:

2020

File:

PDF, 1023 KB

2020

30

[IEEE 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - Hyogo, Japan (2007.1.21-2007.1.25)] 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - Spherical rubidium vapor cells fabricated by micro glass blowing

Jesper Eklund, E., Shkel, Andrei M., Knappe, Svenja, Donley, Elizabeth, Kitching, John

Year:

2007

Language:

english

File:

PDF, 2.00 MB

english, 2007

31

High Quality Factor Resonant MEMS Accelerometer With Continuous Thermal Compensation

Zotov, Sergei A., Simon, Brenton R., Trusov, Alexander A., Shkel, Andrei M.

Journal:

IEEE Sensors Journal

Year:

2015

Language:

english

File:

PDF, 3.28 MB

english, 2015

32

[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Foucault pendulum on a chip: angle measuring silicon MEMS gyroscope

Prikhodko, Igor P., Zotov, Sergei A., Trusov, Alexander A., Shkel, Andrei M.

Year:

2011

Language:

english

File:

PDF, 2.17 MB

english, 2011

33

SPIE Proceedings [SPIE International Symposium on Microelectronics and MEMS - Adelaide, Australia (Monday 17 December 2001)] Device and Process Technologies for MEMS and Microelectronics II - Low-frequency process for silicon-on-insulator deep reactive ion etching

Wasilik, Matthew, Pisano, Albert P., Chiao, Jung-Chih, Faraone, Lorenzo, Harrison, H. Barry, Shkel, Andrei M.

Year:

2001

Language:

english

File:

PDF, 442 KB

english, 2001

34

[IEEE 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Moltrasio (2018.3.26-2018.3.29)] 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - High quality factor MEMS gyroscope with whole angle mode of operation

Askari, Sina, Asadian, Mohammad H., Shkel, Andrei M.

Year:

2018

Language:

english

File:

PDF, 732 KB

english, 2018

35

[IEEE 2012 IEEE/ION Position, Location and Navigation Symposium - PLANS 2012 - Myrtle Beach, SC, USA (2012.04.23-2012.04.26)] Proceedings of the 2012 IEEE/ION Position, Location and Navigation Symposium - High-Q and wide dynamic range inertial MEMS for north-finding and tracking applications

Trusov, Alexander A., Prikhodko, Igor P., Zotov, Sergei A., Shkel, Andrei M.

Year:

2012

Language:

english

File:

PDF, 1.62 MB

english, 2012

36

[IEEE 2018 International Conference on Indoor Positioning and Indoor Navigation (IPIN) - Nantes, France (2018.9.24-2018.9.27)] 2018 International Conference on Indoor Positioning and Indoor Navigation (IPIN) - Error Analysis of ZUPT-Aided Pedestrian Inertial Navigation

Wang, Yusheng, Chernyshoff, Andrei, Shkel, Andrei M.

Year:

2018

Language:

english

File:

PDF, 2.52 MB

english, 2018

37

[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Silicon accelerometer with differential Frequency Modulation and continuous self-calibration

Trusov, Alexander A., Zotov, Sergei A., Simon, Brenton R., Shkel, Andrei M.

Year:

2013

Language:

english

File:

PDF, 1.10 MB

english, 2013

38

[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Frequency modulation based angular rate sensor

Zotov, Sergei A., Prikhodko, Igor P., Trusov, Alexander A., Shkel, Andrei M.

Year:

2011

Language:

english

File:

PDF, 1.38 MB

english, 2011

39

[IEEE 2018 IEEE Sensors - New Delhi (2018.10.28-2018.10.31)] 2018 IEEE SENSORS - Design and Fabrication of 3D Fused Quartz Shell Resonators for Broad Range of Frequencies and Increased Decay Time

Asadian, Mohammad H., Wang, Yusheng, Shkel, Andrei M.

Year:

2018

File:

PDF, 989 KB

2018

40

Low-Dissipation Silicon Tuning Fork Gyroscopes for Rate and Whole Angle Measurements

Trusov, Alexander A., Prikhodko, Igor P., Zotov, Sergei A., Shkel, Andrei M.

Journal:

IEEE Sensors Journal

Year:

2011

Language:

english

File:

PDF, 1.95 MB

english, 2011

41

[IEEE 2020 IEEE/ION Position, Location and Navigation Symposium (PLANS) - Portland, OR, USA (2020.4.20-2020.4.23)] 2020 IEEE/ION Position, Location and Navigation Symposium (PLANS) - 3D Dual-Shell Micro-Resonators for Harsh Environments

Asadian, Mohammad H., Wang, Danmeng, Wang, Yusheng, Shkel, Andrei M.

Year:

2020

File:

PDF, 4.08 MB

2020

42

Design and demonstration of PECVD multilayer dielectric mirrors optimized for micromachined cavity angled sidewalls

Maximillian A. Perez, John Kitching, Andrei M. Shkel

Journal:

Sensors and Actuators A: Physical

Year:

2009

Language:

english

File:

PDF, 2.53 MB

english, 2009

43

[IEEE 2020 IEEE/ION Position, Location and Navigation Symposium (PLANS) - Portland, OR, USA (2020.4.20-2020.4.23)] 2020 IEEE/ION Position, Location and Navigation Symposium (PLANS) - Pedestrian Inertial Navigation System Augmented by Vision-Based Foot-to-foot Relative Position Measurements

Jao, Chi-Shih, Wang, Yusheng, Shkel, Andrei M.

Year:

2020

File:

PDF, 1.70 MB

2020

44

Analytical Closed-Form Estimation of Position Error on ZUPT-Augmented Pedestrian Inertial Navigation

Wang, Yusheng, Vatanparvar, Daryosh, Chernyshoff, Andrei, Shkel, Andrei M.

Journal:

IEEE Sensors Letters

Year:

2018

Language:

english

File:

PDF, 2.34 MB

english, 2018

45

SPIE Proceedings [SPIE International Symposium on Microelectronics and MEMS - Adelaide, Australia (Monday 17 December 2001)] Device and Process Technologies for MEMS and Microelectronics II - Fabrication of refractive and diffractive plastic micro-optical components using microcompression molding

Moon, Su-dong, Ahn, Suho, Kang, Shinill, Choi, Doo-Sun, Je, Tae-Jin, Chiao, Jung-Chih, Faraone, Lorenzo, Harrison, H. Barry, Shkel, Andrei M.

Year:

2001

Language:

english

File:

PDF, 708 KB

english, 2001

46

Design and Demonstration of a Bulk Micromachined Fabry–PÉrot $\mu$g-Resolution Accelerometer

Perez, Maximillian A., Shkel, Andrei M.

Journal:

IEEE Sensors Journal

Year:

2007

Language:

english

File:

PDF, 1.26 MB

english, 2007

47

SPIE Proceedings [SPIE International Symposium on Microelectronics and MEMS - Adelaide, Australia (Monday 17 December 2001)] Device and Process Technologies for MEMS and Microelectronics II - 1D and 2D scanning mirrors using thermal buckle-beam actuation

Sinclair, Michael, Chiao, Jung-Chih, Faraone, Lorenzo, Harrison, H. Barry, Shkel, Andrei M.

Year:

2001

Language:

english

File:

PDF, 208 KB

english, 2001

48

Fluxless silicon-to-alumina bonding using electroplated Au–Sn–Au structure at eutectic composition

Jong S. Kim, Won S. Choi, Dongwook Kim, Andrei Shkel, Chin C. Lee

Journal:

Materials Science and Engineering: A

Year:

2007

Language:

english

File:

PDF, 934 KB

english, 2007

49

[IEEE 2008 IEEE Sensors - Lecce, Italy (2008.10.26-2008.10.29)] 2008 IEEE Sensors - Study of substrate energy dissipation mechanism in in-phase and anti-phase micromachined vibratory gyroscopes

Trusov, Alexander A., Schofield, Adam R., Shkel, Andrei M.

Year:

2008

Language:

english

File:

PDF, 1.67 MB

english, 2008

50

[IEEE 2008 IEEE Sensors - Lecce, Italy (2008.10.26-2008.10.29)] 2008 IEEE Sensors - Micromachined gyroscope design allowing for both robust wide-bandwidth and precision mode-matched operation

Schofield, Adam R., Trusov, Alexander A., Shkel, Andrei M.

Year:

2008

Language:

english

File:

PDF, 1.22 MB

english, 2008

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